Piezoelectric MEMS Linear Motor for Nanopositioning Applications

This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) featuring 3D-printed legs in bridge resonators. The structures consisted aluminum-nitride (AlN) film top millimeter-sized rectangular thin silicon bridges two electrode patches. position size patches were analytically optimized for travelling or standing wave generation, while addition allowed a controlled contact amplified displacement, further step into manufacturing efficient linear motors. Such hybrid devices have recently demonstrated conveyance sliders several times motor weight, with speeds 1.7 mm/s by waves generated at 6 V 19.3 kHz. In this both motors are compared. By optimization various aspects device such as vibrational modes, leg collocation excitation signals, high 35 mm/s, payloads above 10 weight demonstrated. exhibited promising positional resolution actuated only few sinusoidal cycles an open-loop configuration. Discrete steps low 70 nm measured 2-mg sliders.